Invention Grant
- Patent Title: Assembly for blocking a beam of radiation and method of blocking a beam of radiation
- Patent Title (中): 用于阻挡辐射束的组件和阻挡辐射束的方法
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Application No.: US11643954Application Date: 2006-12-22
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Publication No.: US07772570B2Publication Date: 2010-08-10
- Inventor: Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Konstantin Nikolaevich Koshelev , Vladimir Mihailovitch Krivtsun
- Applicant: Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Konstantin Nikolaevich Koshelev , Vladimir Mihailovitch Krivtsun
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: A61N5/00
- IPC: A61N5/00
Abstract:
An assembly is provided for blocking a beam of radiation. The assembly has a pipe arranged to transmit at least part of the beam of radiation. The pipe has an inner surface provided with an ablation material and encloses a volume. The assembly further has an ablation generation device. The ablation generation device is arranged to ablate at least a portion of the ablation material upon reception of a blocking signal. The assembly has a control unit, which is arranged to control the ablation generation device.
Public/Granted literature
- US20080148978A1 Assembly for blocking a beam of radiation and method of blocking a beam of radiation Public/Granted day:2008-06-26
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