Invention Grant
- Patent Title: Insulating film
- Patent Title (中): 绝缘膜
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Application No.: US12040988Application Date: 2008-03-03
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Publication No.: US07772690B2Publication Date: 2010-08-10
- Inventor: Kensuke Morita , Koji Wariishi , Akira Asano , Makoto Muramatsu
- Applicant: Kensuke Morita , Koji Wariishi , Akira Asano , Makoto Muramatsu
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2007-053402 20070302
- Main IPC: H01L23/053
- IPC: H01L23/053 ; H01L23/141

Abstract:
An insulating film for semiconductor devices is obtained by curing, on a substrate, a high molecular compound obtained by polymerizing a cage-type silsesquioxane compound having two or more unsaturated groups as substituents and having a cyclic siloxane structure, wherein the structure of the cage-type silsesquioxane compound is not broken by curing, and the breakage of the cage structure can be detected by observing a peak at approximately 610 cm−1 in Raman spectrum of the film after curing.
Public/Granted literature
- US20080217746A1 INSULATING FILM Public/Granted day:2008-09-11
Information query
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