Invention Grant
- Patent Title: Filtered device container assembly with shield for a reticle
- Patent Title (中): 过滤的设备容器组件，带有用于掩模版的屏蔽
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Application No.: US11655674Application Date: 2007-01-19
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Publication No.: US07773198B2Publication Date: 2010-08-10
- Inventor: Alton H. Phillips
- Applicant: Alton H. Phillips
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Roeder & Broder LLP
- Main IPC: G03B27/62
- IPC: G03B27/62 ; G03B27/52 ; G03B27/42 ; G03F1/00 ; B65D85/00
Abstract:
A device container assembly (30) for storing a reticle (26) includes a device container (246) and a shield assembly (250). The device container (246) encircles the reticle (26). Further, the device container (246) includes a fluid port (254) that allows for the flow of fluid (276) into and out of the device container (246). The shield assembly (250) is encircled by the device container (246). Further, the shield assembly (250) is positioned between the fluid port (254) and the reticle (26) when the reticle (26) is positioned within the device container (246). The shield assembly (250) can inhibit contaminants (278) near the fluid port (254) from being deposited on the reticle (26) and can maintain the integrity of the reticle (26).
Public/Granted literature
- US20070229793A1 Filtered device container assembly with shield for a reticle Public/Granted day:2007-10-04
Information query
