Invention Grant
- Patent Title: Device and process for measuring the characterisation by reflectometry
- Patent Title (中): 通过反射计测量表征的装置和过程
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Application No.: US12302793Application Date: 2007-05-29
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Publication No.: US07773208B2Publication Date: 2010-08-10
- Inventor: Herve Piombini , Philippe Voarino
- Applicant: Herve Piombini , Philippe Voarino
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Nixon Peabody LLP
- Priority: FR0651951 20060530
- International Application: PCT/EP2007/055158 WO 20070529
- International Announcement: WO2007/138032 WO 20071206
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
Embodiments relate to a device for measuring characterisation by reflectometry including a source that emits a light beam, a detector, optics for processing and controlling this light beam so as to focus it on a reflective surface to be measured in the form of a spot and to receive it on the detector, command and acquisition modules, a camera and modules for imaging the spot on the detector and on the camera, wherein the camera is connected to the command and acquisition means so as to automatically focus the spot on the reflective surface to be measured and to automatically conjugate the reflective surface to be measured with the surface of the detector.
Public/Granted literature
- US20090116022A1 DEVICE AND PROCESS FOR MEASURING THE CHARACTERIZATION BY REFLECTOMETRY Public/Granted day:2009-05-07
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