Invention Grant
US07773208B2 Device and process for measuring the characterisation by reflectometry 有权
通过反射计测量表征的装置和过程

Device and process for measuring the characterisation by reflectometry
Abstract:
Embodiments relate to a device for measuring characterisation by reflectometry including a source that emits a light beam, a detector, optics for processing and controlling this light beam so as to focus it on a reflective surface to be measured in the form of a spot and to receive it on the detector, command and acquisition modules, a camera and modules for imaging the spot on the detector and on the camera, wherein the camera is connected to the command and acquisition means so as to automatically focus the spot on the reflective surface to be measured and to automatically conjugate the reflective surface to be measured with the surface of the detector.
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