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US07773428B2 Nonvolatile semiconductor memory having suitable crystal orientation 失效
具有合适晶体取向的非易失性半导体存储器

Nonvolatile semiconductor memory having suitable crystal orientation
Abstract:
An NMOS transistor type nonvolatile semiconductor memory has first and second N-type diffusion layers formed in a P-type silicon layer as a source and a drain; a gate electrode formed on a channel region with an insulating film interposed therebetween, the channel region being sandwiched between the first and second N-type diffusion layers; and a charge storage layer formed in the insulating film. A direction from the first N-type diffusion layer to the second N-type diffusion layer is the same as a crystal orientation of the P-type silicon layer. At the time of rewriting, the hot holes go over a potential barrier of the insulating film to be injected into the charge storage layer.
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