Invention Grant
US07774739B2 Methods for adjusting shifter width of an alternating phase shifter having variable width 有权
用于调整具有可变宽度的交替移相器的移位器宽度的方法

Methods for adjusting shifter width of an alternating phase shifter having variable width
Abstract:
In accordance with an embodiment of the invention, there is a method of designing a lithography mask. The method can comprise determining a maximum width of a shifter, wherein the maximum width corresponds to a width of a shifter for a first set of features and determining whether the shifter having the maximum width can be placed in a shifter space for a second set of features. The method can also comprise incrementally decreasing the width of the shifter to be placed into the shifter space for the second set of features when the shifter having the maximum width cannot be placed in the shifter space for a feature in the second set of features until an acceptable shifter width can be determined or until the shifter width is reduced to a predetermined minimum shifter width.
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