Invention Grant
US07780266B2 Micro-fluidic device having reduced mechanical cross-talk and method for making the micro-fluidic device 有权
具有减少的机械串扰的微流体装置和用于制造微流体装置的方法

Micro-fluidic device having reduced mechanical cross-talk and method for making the micro-fluidic device
Abstract:
A method processes electrical connections in a micro-fluidic device to reduce mechanical cross-talk and improve actuator performance. The method includes applying conductive adhesive to an electrode overlying a piezoelectric material, contacting the conductive adhesive with an electrical contact pad mounted to a support member to cover the electrode and piezoelectric material with the support member, and removing a portion of the support member that covers the electrical contact pad, the electrode, and the actuator.
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