Invention Grant
- Patent Title: Apparatus and method for depositing a material on a substrate
- Patent Title (中): 用于在衬底上沉积材料的装置和方法
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Application No.: US10915695Application Date: 2004-08-11
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Publication No.: US07780787B2Publication Date: 2010-08-24
- Inventor: James F. Nolan
- Applicant: James F. Nolan
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US OH Perrysburg
- Agency: Steptoe & Johnson LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306
Abstract:
Apparatus and a method for depositing a material on a substrate utilizes a distributor including a permeable member through which a carrier gas and a material are passed to provide a vapor that is deposited on a conveyed substrate. A secondary gas can be provided to promote uniform distribution of the material on the substrate.
Public/Granted literature
- US20060032440A1 Apparatus and method for depositing a material on a substrate Public/Granted day:2006-02-16
Information query
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