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US07781067B2 Aligned crystalline semiconducting film on a glass substrate and method of making 失效
玻璃衬底上的对准结晶半导体膜及其制造方法

Aligned crystalline semiconducting film on a glass substrate and method of making
Abstract:
A semiconducting structure having a glass substrate. In one embodiment, the glass substrate has a softening temperature of at least about 750° C. The structure includes a nucleation layer formed on a surface of the substrate, a template layer deposited on the nucleation layer by one of ion assisted beam deposition and reactive ion beam deposition, at least on biaxially oriented buffer layer epitaxially deposited on the template layer, and a biaxially oriented semiconducting layer epitaxially deposited on the buffer layer. A method of making the semiconducting structure is also described.
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