Invention Grant
- Patent Title: Copolymer and top coating composition
- Patent Title (中): 共聚物和顶涂组合物
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Application No.: US11664296Application Date: 2005-09-28
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Publication No.: US07781142B2Publication Date: 2010-08-24
- Inventor: Takashi Chiba , Toru Kimura , Tomohiro Utaka , Hiroki Nakagawa , Hirokazu Sakakibara , Hiroshi Dougauchi
- Applicant: Takashi Chiba , Toru Kimura , Tomohiro Utaka , Hiroki Nakagawa , Hirokazu Sakakibara , Hiroshi Dougauchi
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: JP2004-287724 20040930; JP2005-130557 20050427
- International Application: PCT/JP2005/017790 WO 20050928
- International Announcement: WO2006/035790 WO 20060406
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08F18/20 ; C08F18/22

Abstract:
A resin composition for forming a top coat which can be formed on a photoresist film without causing intermixing with the photoresist film, can maintain a stable film coating which is not eluted into a medium during immersion lithography, does not impair pattern profiles during dry exposure (which is not immersion lithography), and can be easily dissolved in an alkaline developer. The resin is a copolymer which comprises at least one recurring unit (I) selected from the group consisting of a recurring unit having a group shown by the following formula (1), a recurring unit having a group shown by the following formula (2), and a recurring unit having a carboxyl group, and a recurring unit (II) having a sulfo group, the copolymer having a weight average molecular weight determined by gel permeation chromatography of 2,000 to 100,000, wherein at least one of R1 and R2 is a fluoroalkyl group having 1 to 4 carbon atoms and R3 in the formula (2) represents a fluoroalkyl group having 1 to 20 carbon atoms.
Public/Granted literature
- US20080038661A1 Copolymer and Top Coating Composition Public/Granted day:2008-02-14
Information query
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