Invention Grant
US07781238B2 Methods of making and using integrated and testable sensor array
有权
制作和使用集成和可测量传感器阵列的方法
- Patent Title: Methods of making and using integrated and testable sensor array
- Patent Title (中): 制作和使用集成和可测量传感器阵列的方法
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Application No.: US11951360Application Date: 2007-12-06
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Publication No.: US07781238B2Publication Date: 2010-08-24
- Inventor: Robert Gideon Wodnicki , Stacey Joy Kennerly , Wei-Cheng Tian , Kevin Matthew Durocher , David Martin Mills , Charles Gerard Woychik , Lowell Scott Smith
- Applicant: Robert Gideon Wodnicki , Stacey Joy Kennerly , Wei-Cheng Tian , Kevin Matthew Durocher , David Martin Mills , Charles Gerard Woychik , Lowell Scott Smith
- Agent Jason K. Klindtworth
- Main IPC: H01L21/66
- IPC: H01L21/66
Abstract:
A method for making a testable sensor assembly is provided. The method includes forming a first sensor array on a first substrate having a first side and a second side, wherein the first sensor array is formed on the first side of the first substrate, coupling a first semiconductor wafer having a first side and a second side to the first sensor array, wherein the first side of the first semiconductor wafer is coupled to the first sensor array, thinning one of the second side of the first substrate or the second side of the first semiconductor wafer, and testing the first sensor array to identify operational and non-operational units in the testable sensor assembly before integration of the sensor assembly with interface electronics.
Public/Granted literature
- US20090148967A1 METHODS OF MAKING AND USING INTEGRATED AND TESTABLE SENSOR ARRAY Public/Granted day:2009-06-11
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