Invention Grant
- Patent Title: Enclosed nanotube structure and method for forming
- Patent Title (中): 封闭纳米管结构和形成方法
-
Application No.: US11419329Application Date: 2006-05-19
-
Publication No.: US07781267B2Publication Date: 2010-08-24
- Inventor: Jeffrey Peter Gambino , Son Van Nguyen
- Applicant: Jeffrey Peter Gambino , Son Van Nguyen
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Michael J. LeStrange
- Main IPC: H01L21/82
- IPC: H01L21/82

Abstract:
A semiconductor device and associated method for forming. The semiconductor device comprises an electrically conductive nanotube formed over a first electrically conductive member such that a first gap exists between a bottom side the electrically conductive nanotube and a top side of the first electrically conductive member. A second insulating layer is formed over the electrically conductive nanotube. A second gap exists between a top side of the electrically conductive nanotube and a first portion of the second insulating layer. A first via opening and a second via opening each extend through the second insulating layer and into the second gap.
Public/Granted literature
- US20100187502A1 ENCLOSED NANOTUBE STRUCTURE AND METHOD FOR FORMING Public/Granted day:2010-07-29
Information query
IPC分类: