Invention Grant
- Patent Title: Electroless metal deposition for dual work function
- Patent Title (中): 无功金属沉积双功能功能
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Application No.: US12117769Application Date: 2008-05-09
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Publication No.: US07781321B2Publication Date: 2010-08-24
- Inventor: Jeffrey P. Gambino , Michael P. Chudzik , Renee T. Mo
- Applicant: Jeffrey P. Gambino , Michael P. Chudzik , Renee T. Mo
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
The present invention, in one embodiment provides a method of forming a semiconducting device including providing a substrate including a semiconducting surface, the substrate comprising a first device region and a second device region; forming a high-k dielectric layer atop the semiconducting surface of the substrate; forming a block mask atop the second device region of the substrate, wherein the first device region of the substrate is exposed; forming a first metal layer atop the high-k dielectric layer present in the first device region of the substrate; removing the block mask to expose a portion of the high-k dielectric layer in the first device region of the substrate; forming a second metal layer atop the portion of the high-k dielectric layer in the second device region and atop the first metal in the first device region of the substrate; and forming gate structures in the first and second device regions of the substrate.
Public/Granted literature
- US20090280631A1 Electroless Metal Deposition For Dual Work Function Public/Granted day:2009-11-12
Information query
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