Invention Grant
US07781733B2 In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques
失效
用于光学观察和表面处理的原位高分辨率光通道并行带电粒子（FIB和SEM）技术
- Patent Title: In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques
- Patent Title (中): 用于光学观察和表面处理的原位高分辨率光通道并行带电粒子（FIB和SEM）技术
-
Application No.: US11749350Application Date: 2007-05-16
-
Publication No.: US07781733B2Publication Date: 2010-08-24
- Inventor: Steven B. Herschbein , Herschel M. Marchman , Narender Rana , Chad Rue
- Applicant: Steven B. Herschbein , Herschel M. Marchman , Narender Rana , Chad Rue
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: DeLio & Peterson, LLC
- Agent Kelly M. Nowak; Ian D. MacKinnon
- Main IPC: H01J40/14
- IPC: H01J40/14 ; G01N23/00 ; G21K7/00
Abstract:
An apparatus for simultaneous parallel processing of a sample using light energy for optical viewing or surface processing in parallel with a charged particle beam. A charged particle beam transmits a focused ion beam or an electron beam along a path to a sample. An optical microscope transmits light along a first path to the sample, and a prism aligned along the first light path reflects light into a second light path toward the sample. A portion of the prism and reflective surface is removed for passage of the charged particle beam. A lens is aligned along the second light path and has a portion removed for passage of the charged particle beam. The removed portions of the prism and lens are aligned along the charged particle beam path to permit parallel delivery of the charged particle beam and the light to substantially the same portion of the sample.
Public/Granted literature
Information query
