Invention Grant
- Patent Title: Thin film transistor substrate and display device
- Patent Title (中): 薄膜晶体管基板和显示装置
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Application No.: US11743916Application Date: 2007-05-03
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Publication No.: US07781767B2Publication Date: 2010-08-24
- Inventor: Nobuyuki Kawakami , Hiroshi Gotoh , Aya Hino
- Applicant: Nobuyuki Kawakami , Hiroshi Gotoh , Aya Hino
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-152092 20060531
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L31/20 ; H01L31/036 ; H01L31/0376

Abstract:
Disclosed are a thin film transistor substrate where barrier metal can be omitted to be formed between a semiconductor layer of a thin film transistor and source and drain electrodes (barrier metal need not be formed between the semiconductor layer of the thin film transistor and the source and drain electrodes), and a display device. (1) A thin film transistor substrate has a semiconductor layer of a thin film transistor, a source electrode, a drain electrode, and a transparent conductive film, wherein the substrate has a structure in which the source and drain electrodes are directly connected to the semiconductor layer of the thin film transistor, and the source and drain electrodes include an Al alloy thin film containing Ni of 0.1 to 6.0 atomic percent, La of 0.1 to 1.0 atomic percent, and Si of 0.1 to 1.5 atomic percent. (2) A display device has the thin film transistor substrate.
Public/Granted literature
- US20070278497A1 THIN FILM TRANSISTOR SUBSTRATE AND DISPLAY DEVICE Public/Granted day:2007-12-06
Information query
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