Invention Grant
US07781771B2 Bulk non-planar transistor having strained enhanced mobility and methods of fabrication
有权
具有应变增强的移动性和制造方法的散装非平面晶体管
- Patent Title: Bulk non-planar transistor having strained enhanced mobility and methods of fabrication
- Patent Title (中): 具有应变增强的移动性和制造方法的散装非平面晶体管
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Application No.: US12025665Application Date: 2008-02-04
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Publication No.: US07781771B2Publication Date: 2010-08-24
- Inventor: Nick Lindert , Stephen M. Cea
- Applicant: Nick Lindert , Stephen M. Cea
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10

Abstract:
A method of a bulk tri-gate transistor having stained enhanced mobility and its method of fabrication. The present invention is a nonplanar transistor having a strained enhanced mobility and its method of fabrication. The transistor has a semiconductor body formed on a semiconductor substrate wherein the semiconductor body has a top surface on laterally opposite sidewalls. A semiconductor capping layer is formed on the top surface and on the sidewalls of the semiconductor body. A gate dielectric layer is formed on the semiconductor capping layer on the top surface of a semiconductor body and is formed on the capping layer on the sidewalls of the semiconductor body. A gate electrode having a pair of laterally opposite sidewalls is formed on and around the gate dielectric layer. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
Public/Granted literature
- US20080142841A1 Bulk non-planar transistor having strained enhanced mobility and methods of fabrication Public/Granted day:2008-06-19
Information query
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