Invention Grant
- Patent Title: Integrated semiconductor chip with lateral thermal insulation
- Patent Title (中): 集成半导体芯片具有侧向保温
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Application No.: US11774051Application Date: 2007-07-06
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Publication No.: US07781828B2Publication Date: 2010-08-24
- Inventor: Matthias Stecher
- Applicant: Matthias Stecher
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102006031539 20060707
- Main IPC: H01L29/732
- IPC: H01L29/732

Abstract:
An integrated semiconductor with lateral thermal insulation is disclosed. In one embodiment, the chip has, on a common substrate, at least one power semiconductor circuit region and, laterally adjacent to the power semiconductor circuit region, at least one further temperature-sensitive semiconductor circuit region, interspaces being maintained between the circuit regions. At least one thermally insulating trench is provided at least in each interspace in each case between power semiconductor circuit region(s) and temperature-sensitive semiconductor circuit region(s), which at least one thermally insulating trench extends into the depth of the chip right into the substrate and in the longitudinal direction of the chip at least over a lateral side of the at least one power semiconductor circuit region and/or the temperature-sensitive semiconductor circuit region and is either unfilled or filled with a thermally insulating filling material.
Public/Granted literature
- US20080006913A1 INTEGRATED SEMICONDUCTOR CHIP WITH LATERAL THERMAL INSULATION Public/Granted day:2008-01-10
Information query
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