Invention Grant
- Patent Title: Recessed channel transistor and method for preparing the same
- Patent Title (中): 嵌入式沟道晶体管及其制备方法
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Application No.: US12174110Application Date: 2008-07-16
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Publication No.: US07781830B2Publication Date: 2010-08-24
- Inventor: Hsiao Che Wu , Ming Yen Li , Wen Li Tsai , Bin Siang Tsai
- Applicant: Hsiao Che Wu , Ming Yen Li , Wen Li Tsai , Bin Siang Tsai
- Applicant Address: TW Hsinchu
- Assignee: Promos Technologies Inc.
- Current Assignee: Promos Technologies Inc.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C.
- Agent Anthony King
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
A recessed channel transistor comprises a semiconductor substrate having a trench isolation structure, a gate structure having a lower block in the semiconductor substrate and an upper block on the semiconductor substrate, two doped regions positioned at two sides of the upper block and above the lower block, and an insulation spacer positioned at a sidewall of the upper block and having a bottom end sandwiched between the upper block and the doped regions. In particular, the two doped regions serves as the source and drain regions, respectively, and the lower block of the gate structure serves as the recessed gate of the recessed channel transistor.
Public/Granted literature
- US20100013004A1 RECESSED CHANNEL TRANSISTOR AND METHOD FOR PREPARING THE SAME Public/Granted day:2010-01-21
Information query
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