Invention Grant
US07781867B2 Method and system for providing an aligned semiconductor assembly 有权
用于提供对准的半导体组件的方法和系统

  • Patent Title: Method and system for providing an aligned semiconductor assembly
  • Patent Title (中): 用于提供对准的半导体组件的方法和系统
  • Application No.: US11966254
    Application Date: 2007-12-28
  • Publication No.: US07781867B2
    Publication Date: 2010-08-24
  • Inventor: Michael G. Lee
  • Applicant: Michael G. Lee
  • Applicant Address: JP Kawasaki
  • Assignee: Fujitsu Limited
  • Current Assignee: Fujitsu Limited
  • Current Assignee Address: JP Kawasaki
  • Agency: Baker Botts L.L.P.
  • Main IPC: H01L29/06
  • IPC: H01L29/06
Method and system for providing an aligned semiconductor assembly
Abstract:
A semiconductor assembly is provided that includes a first substrate that has a first surface. A second substrate is coupled to and spaced apart from the first substrate. The second substrate has a second surface facing the first surface of the first substrate. The second substrate includes a set of cavities. A set of non-conductive pillars is disposed on and protrudes from the first surface of the first substrate. The set of non-conductive pillars is configured and positioned to engage the set of cavities of the second substrate to align the second substrate with the first substrate.
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