Invention Grant
- Patent Title: Piezoelectric element, ink jet recording head and ink jet printer
- Patent Title (中): 压电元件，喷墨记录头和喷墨打印机
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Application No.: US12047850Application Date: 2008-03-13
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Publication No.: US07781946B2Publication Date: 2010-08-24
- Inventor: Hideto Izumi , Masao Nakayama
- Applicant: Hideto Izumi , Masao Nakayama
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2007-072963 20070320
- Main IPC: H01L41/08
- IPC: H01L41/08 ; B41J2/045
Abstract:
A piezoelectric element includes: a base substrate; a lower electrode formed above the base substrate; a ferroelectric layer formed above the lower electrode; and an upper electrode formed above the ferroelectric layer, wherein an angle of a corner defined by a side surface of the ferroelectric layer and a top surface of the base substrate is between 45° and 75°.
Public/Granted literature
- US20080231146A1 PIEZOELECTRIC ELEMENT, INK JET RECORDING HEAD AND INK JET PRINTER Public/Granted day:2008-09-25
Information query
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