A smooth intermediate film layer having a thickness of 0.2 to 30 nm, little protrusions and a surface layer having high adhesiveness with the light-emitting layer is provided with accuracy on an anode constituting an organic electroluminescent device comprising a light-emitting compound layer present between an anode and a cathode. After the intermediate film layer is formed on the anode surface using a dry processing method by radio frequency plasma treatment or a wet processing method by a spin coating method and the like, preferably it is subjected to optimization treatment (washing) to adjust the smoothness, adhesiveness and thickness of the film. When the wet processing method is used, a surface treatment of the anode is preferably to be performed furthermore before forming the film to control the smoothness and surface conditions. Performing the treatment before and after forming the intermediate layer enables to control the thickness, smoothness and adhesiveness of the film and to obtain an organic electroluminescent device having high emission efficiency and long device life.