Invention Grant
- Patent Title: Probe card analysis system and method
- Patent Title (中): 探针卡分析系统及方法
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Application No.: US11960597Application Date: 2007-12-19
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Publication No.: US07782071B2Publication Date: 2010-08-24
- Inventor: Eric Endres
- Applicant: Eric Endres
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.
Public/Granted literature
- US20080197865A1 PROBE CARD ANALYSIS SYSTEM AND METHOD Public/Granted day:2008-08-21
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