Invention Grant
- Patent Title: Method and apparatus for resonant frequency identification through out-of-plane displacement detection
- Patent Title (中): 用于通过面外位移检测进行谐振频率识别的方法和装置
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Application No.: US11987237Application Date: 2007-11-28
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Publication No.: US07782466B2Publication Date: 2010-08-24
- Inventor: Liang-Chia Chen , Chung-Chu Chang , Yao-Ting Huang , Jin-Liang Chen
- Applicant: Liang-Chia Chen , Chung-Chu Chang , Yao-Ting Huang , Jin-Liang Chen
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Insitute
- Current Assignee: Industrial Technology Research Insitute
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW95146516A 20061212
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.
Public/Granted literature
- US20080137095A1 Method and apparatus for resonant frequency identification through out-of-plane displacement detection Public/Granted day:2008-06-12
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