A large micro-mirror, e.g. 3 mm by 4 mm, in accordance with the present invention has sufficient rigidity to ensure a low mirror curvature, e.g. a radius of curvature greater than 5 meters, and a low mass in order to ensure a high oscillation frequency, e.g. greater than 1000 Hz. A method of making the micro-mirror utilizes bulk micro-machining technology, which enables the manufacture of a honeycomb structure sandwiched between two solid and smooth silicon layers without any indentations or holes. The honeycomb sandwich structure provides the rigidity and low mass needed to obtain a micro-mirror with a low mirror curvature and high resonant frequency.