Invention Grant
US07782528B2 Microscope examination apparatus 有权
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Microscope examination apparatus
Abstract:
A microscope examination apparatus including a light source; an illumination optical system configured to guide light from the light source to a specimen; an objective lens configured to collimate return light from the specimen, the objective lens being provided in such a manner as to be displaceable at least in a direction intersecting an optical axis of the objective lens; an image-forming lens configured to image the return light from the specimen, which is collimated by the objective lens; an optical detector configured to detect the return light imaged by the image-forming lens; a microscope main body including the image-forming lens and the optical detector; and an objective-lens driving mechanism configured to drive the objective lens in a direction correcting image blur due to a displacement of the specimen.
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