Invention Grant
US07782529B2 Scanning microscope and method for examining a sample by using scanning microscopy
有权
扫描显微镜和使用扫描显微镜检查样品的方法
- Patent Title: Scanning microscope and method for examining a sample by using scanning microscopy
- Patent Title (中): 扫描显微镜和使用扫描显微镜检查样品的方法
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Application No.: US11537712Application Date: 2006-10-02
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Publication No.: US07782529B2Publication Date: 2010-08-24
- Inventor: Werner Knebel
- Applicant: Werner Knebel
- Applicant Address: DE
- Assignee: Leica Microsystems CMS GmbH
- Current Assignee: Leica Microsystems CMS GmbH
- Current Assignee Address: DE
- Agency: Houston Eliseeva, LLP
- Priority: DE102004016253 20040402
- Main IPC: G02B21/06
- IPC: G02B21/06 ; G02B21/00

Abstract:
A scanning microscope including a light source for generating an illumination light beam, a beam deflection apparatus for guiding solely the illumination light beam via an illumination light path over and/or through a sample, at least one objective for focusing the illumination light beam onto and/or into the sample, components for generating a manipulation illumination pattern, components for imaging the manipulation illumination pattern onto and/or into the sample via a manipulation light path, and a detection device that receives detected light emanating from the sample. The manipulation light path omits the beam deflection apparatus and is separate from the illumination light path.
Public/Granted literature
- US20070051869A1 Scanning microscope and method for examining a sample by using scanning microscopy Public/Granted day:2007-03-08
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