Invention Grant
US07782529B2 Scanning microscope and method for examining a sample by using scanning microscopy 有权
扫描显微镜和使用扫描显微镜检查样品的方法

Scanning microscope and method for examining a sample by using scanning microscopy
Abstract:
A scanning microscope including a light source for generating an illumination light beam, a beam deflection apparatus for guiding solely the illumination light beam via an illumination light path over and/or through a sample, at least one objective for focusing the illumination light beam onto and/or into the sample, components for generating a manipulation illumination pattern, components for imaging the manipulation illumination pattern onto and/or into the sample via a manipulation light path, and a detection device that receives detected light emanating from the sample. The manipulation light path omits the beam deflection apparatus and is separate from the illumination light path.
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