Invention Grant
- Patent Title: Method for fabricating distributed Bragg reflector waveguide
- Patent Title (中): 分布布拉格反射波导制造方法
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Application No.: US12390596Application Date: 2009-02-23
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Publication No.: US07783151B2Publication Date: 2010-08-24
- Inventor: Chii-Chang Chen , Hua-Kung Chiu
- Applicant: Chii-Chang Chen , Hua-Kung Chiu
- Applicant Address: TW Jhongli, Taoyuan County
- Assignee: National Central University
- Current Assignee: National Central University
- Current Assignee Address: TW Jhongli, Taoyuan County
- Agency: Thomas, Kayden, Horstemeyer & Risley, LLP
- Priority: TW97141198A 20081027
- Main IPC: G02B6/10
- IPC: G02B6/10 ; G02B6/12 ; G02B6/34 ; G02B6/00 ; G02B6/02 ; G02F1/295 ; H01S5/00 ; H01S3/08 ; H01L21/00 ; C03B37/022 ; B05D5/06
Abstract:
A method for fabricating a distributed Bragg reflector waveguide is disclosed, which includes forming a first distributed Bragg reflector on a substrate; forming a sacrificial pattern on the first distributed Bragg reflector; forming a second distributed Bragg reflector on the sacrificial pattern and the first distributed Bragg reflector; and removing the sacrificial pattern. A distributed Bragg reflector waveguide is also disclosed.
Public/Granted literature
- US20100104235A1 Distributed Bragg Reflector Waveguide and Fabricating Method Thereof Public/Granted day:2010-04-29
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