Invention Grant
- Patent Title: Non-volatile semiconductor memory device and method of manufacturing the same
- Patent Title (中): 非易失性半导体存储器件及其制造方法
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Application No.: US12078406Application Date: 2008-03-31
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Publication No.: US07785964B2Publication Date: 2010-08-31
- Inventor: Jin-Jun Park , Hee-Jin Kwak , Beom-Jun Jin
- Applicant: Jin-Jun Park , Hee-Jin Kwak , Beom-Jun Jin
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-0033386 20070404
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Example embodiments relate to a non-volatile semiconductor memory device and a method of manufacturing the same. A semiconductor device includes an isolation layer protruding from a substrate, a spacer, a tunnel insulation layer, a floating gate, a dielectric layer pattern and a control gate. The spacer may be formed on a sidewall of a protruding portion of the isolation layer. The tunnel insulation layer may be formed on the substrate between adjacent isolation layers. The floating gate may be formed on the tunnel insulation layer. The floating gate contacts the spacer and has a width that gradually increases from a lower portion toward an upper portion. The dielectric layer pattern and the control gate may be sequentially formed on the floating gate.
Public/Granted literature
- US20090008699A1 Non-volatile semiconductor memory device and method of manufacturing the same Public/Granted day:2009-01-08
Information query
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