Invention Grant
- Patent Title: Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same
- Patent Title (中): 包括具有不同薄片电阻的电阻器的集成电路及其制造方法
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Application No.: US12173407Application Date: 2008-07-15
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Publication No.: US07785979B2Publication Date: 2010-08-31
- Inventor: Roger Allen Booth, Jr. , Kangguo Cheng , Terence B. Hook
- Applicant: Roger Allen Booth, Jr. , Kangguo Cheng , Terence B. Hook
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Joseph Petrokaitis
- Main IPC: H01L21/324
- IPC: H01L21/324 ; H01L21/8238

Abstract:
The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.
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