Invention Grant
- Patent Title: Support member of vibrator
- Patent Title (中): 支持振动器的成员
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Application No.: US12259441Application Date: 2008-10-28
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Publication No.: US07788978B2Publication Date: 2010-09-07
- Inventor: Seiji Ishikawa , Takayuki Kikuchi , Shigeki Hayashi
- Applicant: Seiji Ishikawa , Takayuki Kikuchi , Shigeki Hayashi
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Burr & Brown
- Priority: JP2003-382739 20031112
- Main IPC: G01P9/04
- IPC: G01P9/04 ; H01L41/00

Abstract:
The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It is provided a supporting member for supporting a vibrator with bonding wires. The supporting member has a supporting plate with an opening formed therein to be positioned direct under a vibrator, and a bonding wire comprising a bonding end to be bonded with the vibrator, a fixed portion fixed on the supporting plate and a bent portion direct under the opening. A distance “L1” between the bent portion and a position where the bonding wire starts to protrude from the supporting plate is 10 percent or more of a distance “L2” of the bent portion and the bonding end.
Public/Granted literature
- US20090072672A1 SUPPORT MEMBER OF VIBRATOR Public/Granted day:2009-03-19
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