Invention Grant
- Patent Title: Ejection inspection device, liquid droplet ejection apparatus, method of manufacturing electro-optic device, electro-optic device, and electronic apparatus
- Patent Title (中): 喷射检查装置，液滴喷射装置，电光装置的制造方法，电光装置和电子装置
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Application No.: US11708169Application Date: 2007-02-19
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Publication No.: US07789038B2Publication Date: 2010-09-07
- Inventor: Kenji Sakamoto
- Applicant: Kenji Sakamoto
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2006-066425 20060310
- Main IPC: B05C5/02
- IPC: B05C5/02
Abstract:
An ejection inspection device includes: an inspection stage on which an inspection sheet is sucked and mounted; a sheet feeding mechanism which feeds the inspection sheet wound in a roll form onto the inspection stage; a sheet taking-up mechanism which takes up the fed inspection sheet from the inspection stage; a suction air valve unit which controls the suction air of the inspection stage; a floating air valve unit which controls the floating air of the inspection stage; and a control unit which controls the suction air valve unit, the floating air valve unit, the sheet feeding mechanism, and the sheet taking-up mechanism. The control unit floats the inspection sheet for performing the feeding operation of the inspection sheet and the taking-up operation thereof.
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