Invention Grant
- Patent Title: Method and system for lamp temperature control in optical metrology
- Patent Title (中): 光度计中灯温控制的方法和系统
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Application No.: US12059610Application Date: 2008-03-31
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Publication No.: US07789541B2Publication Date: 2010-09-07
- Inventor: Ching-Ling Meng , Mihail Mihaylov
- Applicant: Ching-Ling Meng , Mihail Mihaylov
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Main IPC: F21V29/00
- IPC: F21V29/00 ; H01J13/14
Abstract:
A method and system are provided for lamp temperature control for optical metrology. Precise control of the lamp temperature provides the improved signal-to-noise ratios required for accurately determining the profile of nanometer sized structures using optical metrology.
Public/Granted literature
- US20090244910A1 METHOD AND SYSTEM FOR LAMP TEMPERATURE CONTROL IN OPTICAL METROLOGY Public/Granted day:2009-10-01
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