Invention Grant
- Patent Title: Stepped retaining ring
- Patent Title (中): 步进护环
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Application No.: US11549622Application Date: 2006-10-13
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Publication No.: US07789736B2Publication Date: 2010-09-07
- Inventor: Shaun Van Der Veen , Steven M. Zuniga
- Applicant: Shaun Van Der Veen , Steven M. Zuniga
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B29/00
- IPC: B24B29/00
Abstract:
A two part retaining ring is described. An rigid upper portion has an annular recess along its inner diameter. An annular wearable lower portion has an inner diameter, an annular extension defined by the inner diameter and a vertical wall that is perpendicular to a surface of the second portion and opposite to the inner diameter. The annular extension fits into the annular recess of the annular first portion. A bonding material is on the vertical wall of the annular second portion.
Public/Granted literature
- US20080096467A1 Stepped retaining ring Public/Granted day:2008-04-24
Information query
