Invention Grant
- Patent Title: Sheet for mounting polishing workpiece and method for making the same
- Patent Title (中): 用于安装抛光工件的板及其制造方法
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Application No.: US11478601Application Date: 2006-07-03
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Publication No.: US07789738B2Publication Date: 2010-09-07
- Inventor: Chung-Chih Feng , I-Peng Yao , Chen-Hsiang Chao
- Applicant: Chung-Chih Feng , I-Peng Yao , Chen-Hsiang Chao
- Applicant Address: TW Kaoshiung
- Assignee: San Fang Chemical Industry Co., Ltd.
- Current Assignee: San Fang Chemical Industry Co., Ltd.
- Current Assignee Address: TW Kaoshiung
- Agency: Volentine & Whitt, PLLC
- Main IPC: B24B41/06
- IPC: B24B41/06

Abstract:
The present invention relates to a sheet for mounting a polishing workpiece. The sheet comprises a substrate, a surface layer and a slightly rough layer. The substrate has a surface. The surface layer is located on the surface of the substrate, with no hole structure existing in the interior thereof, and has a surface. The slightly rough layer is located on the surface of the surface layer to carry and mount the polishing workpiece, with no hole structure existing in the interior thereof. Accordingly, when the polishing workpiece contacts the slightly rough layer, the air therebetween is easily vented out via the slightly rough layer, without the phenomenon of air wrapping, which increases the adsorption force between the polishing workpiece and the sheet.
Public/Granted literature
- US20080003932A1 Sheet for mounting polishing workpiece and method for making the same Public/Granted day:2008-01-03
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