Invention Grant
- Patent Title: Treatment of the working layer of a multilayer structure
- Patent Title (中): 处理多层结构的工作层
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Application No.: US11433713Application Date: 2006-05-12
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Publication No.: US07790048B2Publication Date: 2010-09-07
- Inventor: Frédéric Allibert , François Brunier
- Applicant: Frédéric Allibert , François Brunier
- Applicant Address: FR Bernin
- Assignee: S.O.I.Tec Silicon on Insulator Technologies
- Current Assignee: S.O.I.Tec Silicon on Insulator Technologies
- Current Assignee Address: FR Bernin
- Agency: Winston & Strawn LLP
- Priority: FR04-02473 20040310
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C23F1/00

Abstract:
The invention relates to a method for forming a plurality of electrically conductive islands in a working layer of a multilayer structure made from semiconductor materials, with the structure including an electrically insulating layer located beneath the working layer. This method includes the steps of selectively masking certain regions of the working layer in order to define several islands therein, with each region masked from the working layer corresponding to a respective island, and then wet chemical etching of the masked working layer to form a plurality of working layer islands each surrounded by the electrically insulating layer. The invention also proposes the application of such a method to the characterization of the electrical properties of a structure, and an associated device.
Public/Granted literature
- US20060201907A1 Treatment of the working layer of a multilayer structure Public/Granted day:2006-09-14
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