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US07790116B2 Microfluidic device with controlled substrate conductivity 有权
具有受控衬底导电性的微流控器件

Microfluidic device with controlled substrate conductivity
Abstract:
A method to achieve controlled conductivity in microfluidic devices, and a device formed thereby. The method comprises forming a microchannel or a well in an insulating material, and ion implanting at least one region of the insulating material at or adjacent the microchannel or well to increase conductivity of the region.
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