Invention Grant
US07790230B2 Metal chloride seeded growth of electronic and optical materials 失效
金属氯化物种子生长的电子和光学材料

Metal chloride seeded growth of electronic and optical materials
Abstract:
A method of deposition by: depositing a metal halide on a substrate; providing a vapor that forms a material by way of chemical vapor deposition; heating the metal halide to a temperature at or above the melting point of the metal halide and at or below the melting point of the material; and contacting the metal halide with the vapor to cause growth on the substrate of a solid solution of the metal halide in the material. The metal is a rare earth metal or a transition metal.
Public/Granted literature
Information query
Patent Agency Ranking
0/0