Invention Grant
US07790301B2 Hard coating, target for forming hard coating, and method for forming hard coating 有权
硬涂层,硬质涂层用靶,硬涂层形成方法

Hard coating, target for forming hard coating, and method for forming hard coating
Abstract:
The present invention attempts to provide a hard coating which has excellent hardness and lubricity. Such attempt has been completed by providing a hard coating comprising (Al1-aVa)(C1-xNx) wherein 0.27≦a≦0.75, and 0.3≦X≦1, wherein a and X independently represent an atomic ratio.
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