Invention Grant
- Patent Title: Method and materials for patterning a neutral surface
- Patent Title (中): 用于图案化中性面的方法和材料
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Application No.: US11882163Application Date: 2007-07-30
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Publication No.: US07790350B2Publication Date: 2010-09-07
- Inventor: Gregory Breyta , Matthew E. Colburn
- Applicant: Gregory Breyta , Matthew E. Colburn
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: The Law Offices of Robert J. Eichelburg
- Agent R. J. Eichelburg
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004

Abstract:
A self assembly step for the manufacture of an electronic component comprising, e.g., a semiconductor chip or semiconductor array or wafer comprises forming a block copolymer film placed on a random copolymer film substrate operatively associated with the electronic component and the block copolymer film wherein the surface energy of the random copolymer film is tailored by use of a photolithographic or chemical process prior to the self assembly step. By prior deterministic control over regional surface properties of the random copolymer film, domains of the block copolymer film form only in predefined areas. This approach offers simplified processing and a precise control of regions where domain formation occurs. Selective removal of some of the domains allows for further processing of the electronic component.
Public/Granted literature
- US20090035668A1 Method and materials for patterning a neutral surface Public/Granted day:2009-02-05
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