Invention Grant
- Patent Title: Apparatus and method for cleaning glass substrates using a cool hydrogen flame
- Patent Title (中): 使用冷氢火焰清洗玻璃基板的设备和方法
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Application No.: US12366660Application Date: 2009-02-06
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Publication No.: US07790477B2Publication Date: 2010-09-07
- Inventor: David Tee Liang , Tuti Mariana Lim , Sau Ngen Chen
- Applicant: David Tee Liang , Tuti Mariana Lim , Sau Ngen Chen
- Applicant Address: SG Singapore
- Assignee: Agency For Science, Technology And Research
- Current Assignee: Agency For Science, Technology And Research
- Current Assignee Address: SG Singapore
- Agency: Pyprus Pte Ltd
- Main IPC: H01L21/00
- IPC: H01L21/00 ; A61L2/00
Abstract:
Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.
Public/Granted literature
- US20090188534A1 Apparatus And Method For Cleaning Glass Substrates Using A Cool Hydrogen Flame Public/Granted day:2009-07-30
Information query
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