Invention Grant
- Patent Title: Electronic device and method for producing the same
- Patent Title (中): 电子装置及其制造方法
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Application No.: US12274977Application Date: 2008-11-20
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Publication No.: US07790539B2Publication Date: 2010-09-07
- Inventor: Ryuichiro Maruyama , Masafumi Ata , Masashi Shiraishi
- Applicant: Ryuichiro Maruyama , Masafumi Ata , Masashi Shiraishi
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A microelectronic device and a method for producing the device can overcome the disadvantages of known electronic devices composed of carbon molecules, and can deliver performance superior to the known devices. An insulated-gate field-effect transistor includes a multi-walled carbon nanotube (10) having an outer semiconductive carbon nanotube layer (1) and an inner metallic carbon nanotube layer (2) that is partially covered by the outer semiconductive carbon nanotube layer (1). A metal source electrode (3) and a metal drain electrode (5) are brought into contact with both ends of the semiconductive carbon nanotube layer (1) while a metal gate electrode (4) is brought into contact with the metallic carbon nanotube layer (2). The space between the semiconductive carbon nanotube layer (1) and the metallic carbon nanotube layer (2) is used as a gate insulating layer. Two layers including the outer semiconductive carbon nanotube layer (1) and the inner metallic carbon nanotube layer (2) are selected from carbon nanotube layers of a multi-walled carbon nanotube. These layers are processed into a form suitable for use as the multi-walled carbon nanotube (10).
Public/Granted literature
- US20090075407A1 ELECTRONIC DEVICE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2009-03-19
Information query
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