Invention Grant
US07790542B2 CMOS devices having reduced threshold voltage variations and methods of manufacture thereof
失效
具有降低的阈值电压变化的CMOS器件及其制造方法
- Patent Title: CMOS devices having reduced threshold voltage variations and methods of manufacture thereof
- Patent Title (中): 具有降低的阈值电压变化的CMOS器件及其制造方法
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Application No.: US12141314Application Date: 2008-06-18
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Publication No.: US07790542B2Publication Date: 2010-09-07
- Inventor: Thomas Walter Dyer , Haining Sam Yang
- Applicant: Thomas Walter Dyer , Haining Sam Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Joseph Petrokaitis
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Stress enhanced transistor devices and methods of fabricating the same are provided. In one embodiment, a transistor device comprises: a gate conductor disposed above a semiconductor substrate between a pair of dielectric spacers, wherein the semiconductor substrate comprises a channel region underneath the gate conductor and recessed regions on opposite sides of the channel region, wherein the recessed regions undercut the dielectric spacers to form undercut areas of the channel region; and epitaxial source and drain regions disposed in the recessed regions of the semiconductor substrate and extending laterally underneath the dielectric spacers into the undercut areas of the channel region.
Public/Granted literature
- US20090315117A1 CMOS DEVICES HAVING REDUCED THRESHOLD VOLTAGE VARIATIONS AND METHODS OF MANUFACTURE THEREOF Public/Granted day:2009-12-24
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