Invention Grant
US07790546B2 Method for forming storage node of capacitor in semiconductor device
有权
在半导体器件中形成电容器的存储节点的方法
- Patent Title: Method for forming storage node of capacitor in semiconductor device
- Patent Title (中): 在半导体器件中形成电容器的存储节点的方法
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Application No.: US12168823Application Date: 2008-07-07
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Publication No.: US07790546B2Publication Date: 2010-09-07
- Inventor: Jun-Hyeub Sun , Sung-Kwon Lee , Sung-Yoon Cho
- Applicant: Jun-Hyeub Sun , Sung-Kwon Lee , Sung-Yoon Cho
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Townsend and Townsend and Crew LLP
- Priority: KR10-2004-0108694 20041220; KR10-2004-0110083 20041222; KR10-2004-0112821 20041227
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
A method for forming a capacitor in a semiconductor device comprises forming an inter-layer layer on a semi-finished substrate; etching the inter-layer insulation layer to form a plurality of first contact holes; forming a first insulation layer on sidewalls of the first contact holes; forming a plurality of storage-node contact plugs filled into the first contact holes; forming a second insulation layer with a different etch rate from the first insulation layer over the storage-node contact plugs; forming a third insulation layer on the second insulation layer; sequentially etching the third insulation layer and the second insulation layer to form a plurality of second contact holes exposing the storage-node contact plugs; and forming the storage node on each of the second contact holes.
Public/Granted literature
- US20080293212A1 METHOD FOR FORMING STORAGE NODE OF CAPACITOR IN SEMICONDUCTOR DEVICE Public/Granted day:2008-11-27
Information query
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