Invention Grant
US07790548B2 Methods of fabricating field effect transistors including recessed forked gate structures
有权
制造场效应晶体管的方法,包括凹进的分叉栅极结构
- Patent Title: Methods of fabricating field effect transistors including recessed forked gate structures
- Patent Title (中): 制造场效应晶体管的方法,包括凹进的分叉栅极结构
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Application No.: US11944819Application Date: 2007-11-26
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Publication No.: US07790548B2Publication Date: 2010-09-07
- Inventor: Bo-Young Song , Tae-Young Chung
- Applicant: Bo-Young Song , Tae-Young Chung
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2006-0121148 20061204
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A transistor includes substrate having an active region therein. The active region includes a recess therein having opposing sidewalls and a surface therebetween. A protrusion extends from the surface of the recess between the opposing sidewalls thereof. The transistor further includes a gate insulation layer on the protrusion in the recess, a gate electrode on the gate insulation layer in the recess, and source/drain regions in the active region on opposite sides of the gate electrode and adjacent to the opposing sidewalls of the recess. The gate electrode includes portions that extend into the recess between the protrusion and the opposing sidewalls of the recess. Related methods of fabrication are also discussed.
Public/Granted literature
- US20080128800A1 FIELD EFFECT TRANSISTORS INCLUDING RECESSED FORKED GATE STRUCTURES AND METHODS OF FABRICATING THE SAME Public/Granted day:2008-06-05
Information query
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