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US07790550B2 Trench transistor and method for fabricating a trench transistor 有权
沟槽晶体管和制造沟槽晶体管的方法

Trench transistor and method for fabricating a trench transistor
Abstract:
A trench transistor having a semiconductor body, in which a trench structure and an electrode structure embedded in the trench structure is disclosed. The electrode structure is electrically insulated from the semiconductor body by an insulation structure. The electrode structure has a gate electrode structure and a field electrode structure arranged below the gate electrode structure and electrically insulated from the latter. There is provided between the gate electrode structure and the field electrode structure a shielding structure for reducing the capacitive coupling between the gate electrode structure and the field electrode structure.
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