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US07790551B2 Method for fabricating a transistor having a recess gate structure 失效
一种制造具有凹槽栅结构的晶体管的方法

Method for fabricating a transistor having a recess gate structure
Abstract:
A transistor having a recess gate structure and a method for fabricating the same. The transistor includes a gate insulating layer formed on the inner walls of first trenches formed in a semiconductor substrate; a gate conductive layer formed on the gate insulating layer for partially filling the first trenches; gate electrodes formed on the gate conductive layer for completely filling the first trenches, and surrounded by the gate conductive layer; channel regions formed in the semiconductor substrate along the first trenches; and source/drain regions formed in a shallow portion of the semiconductor substrate.
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