Invention Grant
US07790555B2 Semiconductor device manufacturing method with spin-coating of photoresist material
有权
具有光致抗蚀剂材料旋涂的半导体器件制造方法
- Patent Title: Semiconductor device manufacturing method with spin-coating of photoresist material
- Patent Title (中): 具有光致抗蚀剂材料旋涂的半导体器件制造方法
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Application No.: US11805195Application Date: 2007-05-21
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Publication No.: US07790555B2Publication Date: 2010-09-07
- Inventor: Akiko Tsukamoto , Hisashi Hasegawa , Jun Osanai
- Applicant: Akiko Tsukamoto , Hisashi Hasegawa , Jun Osanai
- Applicant Address: JP
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2006-148448 20060529
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor device manufacturing method includes a field oxide insulation film forming step, an electrode forming step, and a resistor forming step. The field oxide insulation film forming step comprises forming a field oxide insulation film on a surface of the semiconductor substrate so that a portion which corresponds to a side surface portion for each of active regions formed on the surface of the semiconductor substrate, which opposes a rotation center of the surface of the semiconductor substrate in spin-coating of a photoresist in the electrode forming step, and which is located at a front side of a centrifugal force acting direction along the surface of the semiconductor substrate has a curved surface that is convex in a forward direction of the centrifugal force along the surface of the semiconductor substrate as seen in plan view of the semiconductor substrate.
Public/Granted literature
- US20070272984A1 Semiconductor device manufacturing method and semiconductor device Public/Granted day:2007-11-29
Information query
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