Invention Grant
US07790596B2 Apparatus and method for semiconductor wafer bumping via injection molded solder
有权
通过注射成型焊料的半导体晶片凸块的装置和方法
- Patent Title: Apparatus and method for semiconductor wafer bumping via injection molded solder
- Patent Title (中): 通过注射成型焊料的半导体晶片凸块的装置和方法
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Application No.: US12025845Application Date: 2008-02-05
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Publication No.: US07790596B2Publication Date: 2010-09-07
- Inventor: Hale Johnson , Wilhelm Lapointe
- Applicant: Hale Johnson , Wilhelm Lapointe
- Applicant Address: DE Garching/Munich
- Assignee: Suss Microtec AG
- Current Assignee: Suss Microtec AG
- Current Assignee Address: DE Garching/Munich
- Agency: AKC Patents LLC
- Agent Aliki K. Collins
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An improved apparatus for positioning and aligning a patterned surface of a semiconductor structure directly opposite to solder filled patterned mold cavities of a mold structure includes a pattern based alignment too including means for identifying a mold training pattern image and a semiconductor training pattern image on a training mold structure and a training semiconductor structure, respectively, means for training the alignment tool with the training pattern images, means for storing the alignment tool trained position, means for identifying a mold pattern image and a semiconductor pattern image on the mold structure and the semiconductor structure matching the mold training pattern image and the semiconductor training pattern image, respectively, and means for aligning the identified mold pattern image with the semiconductor pattern image.
Public/Granted literature
- US20080188070A1 APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER BUMPING VIA INJECTION MOLDED SOLDER Public/Granted day:2008-08-07
Information query
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