Invention Grant
- Patent Title: Synthesis of zeolite crystals and formation of carbon nanostructures in patterned structures
- Patent Title (中): 沸石晶体的合成和在图案化结构中形成碳纳米结构
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Application No.: US12358063Application Date: 2009-01-22
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Publication No.: US07790600B2Publication Date: 2010-09-07
- Inventor: Pierre Jacobs , Bert Sels , Jasper Van Noyen , Caroline Whelan , Karen Maex , Filip de Clippel
- Applicant: Pierre Jacobs , Bert Sels , Jasper Van Noyen , Caroline Whelan , Karen Maex , Filip de Clippel
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC,Katholieke Universiteit Leuven
- Current Assignee: IMEC,Katholieke Universiteit Leuven
- Current Assignee Address: BE Leuven BE Leuven
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: EP08155596 20080502
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A method is provided for incorporating zeolite crystals in patterned structures, the zeolite crystals having pores (channels) with an orientation which is defined by the topology of the zeolite crystal type and the geometry of the patterned structure, resulting in pores parallel with the length axis of the patterned structures. The patterned structures may be vias (vertical contacts) and trenches (horizontal lines) in a semiconductor substrate. These zeolite crystals can advantageously be used for dense and aligned nanocarbon growth or in other words growth of carbon nanostructures such as carbon nanotubes (CNT) within the pores of the zeolite structure. The growth of CNT is achieved within the porous structure of the zeolite crystals whereby the pores can be defined as confined spaces (channels) in nanometer dimensions acting as a micro-reactor for CNT growth. A method for growing carbon nanostructures within zeolite crystals is also provided, by adding, after creation of the zeolite crystals, a novel compound within the porous structure of the zeolite crystals whereby said novel compound is acting as a carbon source to create the carbon nanostructures. The improved growth method gives a significantly higher carbon density (yield) compared to state of the art techniques.
Public/Granted literature
- US20090243103A1 SYNTHESIS OF ZEOLITE CRYSTALS AND FORMATION OF CARBON NANOSTRUCTURES IN PATTERNED STRUCTURES Public/Granted day:2009-10-01
Information query
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