Invention Grant
- Patent Title: Method of measuring dimension of film constituting element and apparatus therefor
- Patent Title (中): 测量薄膜构成元件尺寸的方法及其装置
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Application No.: US12196440Application Date: 2008-08-22
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Publication No.: US07791024B2Publication Date: 2010-09-07
- Inventor: Toyoo Miyajima , Yasutoshi Kotaka
- Applicant: Toyoo Miyajima , Yasutoshi Kotaka
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-218142 20070824
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
A method of evaluating an element that includes the step of preparing a thin evaluation sample including a first portion in which a first layer containing a first material and a second layer containing a second material are laminated, a second portion containing the first material, and a third portion containing the second material; and calculating the thickness of the first layer in the first portion.
Public/Granted literature
- US20090050804A1 METHOD OF MEASURING DIMENSION OF FILM CONSTITUTING ELEMENT AND APPARATUS THEREFOR Public/Granted day:2009-02-26
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